发明名称 |
Charged particle beam emitting device and method for adjusting the optical axis |
摘要 |
A charged-particle beam emitting device which includes the following configuration devices so that a lowering in the image resolution will be suppressed even if a primary beam is tilted relative to a sample: A device for causing orbit of the primary beam to pass through off-axes of a plurality of lenses, and controlling off-axis orbit of the primary beam. This device allows the aberration which occurs in the objective lens at the time of beam tilt to be cancelled out by the aberration which occurs in the other lens. Also, there is provided a device for simultaneously modulating excitations of the plurality of lenses including the objective lens.
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申请公布号 |
US2005285036(A1) |
申请公布日期 |
2005.12.29 |
申请号 |
US20050166370 |
申请日期 |
2005.06.27 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SATO MITSUGU;EZUMI MAKOTO;YAMAGUCHI SATORU |
分类号 |
G01N23/225;H01J37/26;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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