ION BEAM SCANNING SYSTEMS AND METHODS FOR IMPROVED ION IMPLANTATION UNIFORMITY

摘要

Ion implantation systems and scanning systems therefor, in which focus adjustment apparatus is provided to dynamically adjust a focal property of an ion beam to compensate for at least one time varying focal property of a scanner. Methods for providing a scanned ion beam to a workpiece, comprising dynamically adjusting a focal property of an ion beam, scanning the ion beam to create a scanned ion beam, and directing the scanned ion beam toward a workpiece.