发明名称 Semiconductor constructions comprising cerium oxide and titanium oxide
摘要 The invention includes semiconductor constructions comprising dielectric materials which contain cerium oxide and titanium oxide. The dielectric materials can contain a homogeneous distribution of cerium oxide and titanium oxide, and/or can contain a laminate of cerium oxide and titanium oxide. The dielectric materials can be incorporated into any suitable semiconductor devices, including, for example, capacitor devices, transistor devices, and flash memory devices. The invention also includes methods of utilizing atomic layer deposition to form laminates of cerium oxide and titanium oxide.
申请公布号 US2005285225(A1) 申请公布日期 2005.12.29
申请号 US20040881874 申请日期 2004.06.29
申请人 AHN KIE Y;FORBES LEONARD 发明人 AHN KIE Y.;FORBES LEONARD
分类号 C04B35/46;C04B35/48;C04B35/49;C23C16/40;H01L21/316;H01L21/336;H01L21/8242;H01L29/00;H01L29/10;H01L29/51;(IPC1-7):C04B35/46;H01L21/824 主分类号 C04B35/46
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