| 发明名称 |
METHODS AND SYSTEMS FOR LAYOUT AND ROUTING USING ALTERNATING APERTURE PHASE SHIFT MASKS |
| 摘要 |
Methods for performing phase-correct layout and routing of integrated circuits using alternating aperture phase shift masks (AltPSM), including bright field AltPSM and dark field AltPSM are disclosed. Also disclosed are systems for performing phase-correct layout and routing, including computer-based routing programs and systems.
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| 申请公布号 |
US2005287443(A1) |
申请公布日期 |
2005.12.29 |
| 申请号 |
US20040710165 |
申请日期 |
2004.06.23 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MCCULLEN KEVIN W. |
| 分类号 |
G03F1/00;G06F17/50;(IPC1-7):G03F1/00 |
主分类号 |
G03F1/00 |
| 代理机构 |
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