| 摘要 |
The invention relates to a device for covering substrates in a rotating manner (8) with an aqueous medium. Said device comprises a rotatable substrate holder (2) which is used to horizontally position a substrate (8), and a cover unit (9) which is used to cover the substrate (8) during a distribution step of the aqueous medium by rotating the substrate holder (8). According to the invention, the substrate holder (2) can be connected to the cover unit in a sealed manner (9). The inventive device also comprises through holes which are arranged on the periphery, by means of which the inside of the covering (10), formed by the cover unit (9) and the substrate holder (2), is connected on the outside. |
