发明名称 Method and apparatus for molding a semiconductor device
摘要 A method and apparatus is provided for molding a semiconductor device in a mold including two mold halves. One mold half includes a compressible sealing mechanism constructed and configured to exert a sealing pressure between a surface of the mold half and a surface of a semiconductor device located in the mold. A compliant tape is positionable onto the mold half comprising the sealing mechanism between the semiconductor device and the sealing mechanism for molding of the semiconductor device.
申请公布号 US2005287236(A1) 申请公布日期 2005.12.29
申请号 US20040876922 申请日期 2004.06.25
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 HO SHU C.;KUAH TENG H.;ZHANG ZHI P.;LEE SHUAI G.;LI CHUN Y.;LIN YI
分类号 A23G1/20;H01L21/56;(IPC1-7):A23G1/20 主分类号 A23G1/20
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