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发明名称
APPARATUS FOR DEPOSITING THIN FILM ON WAFER
摘要
申请公布号
KR20050121873(A)
申请公布日期
2005.12.28
申请号
KR20040046965
申请日期
2004.06.23
申请人
INTEGRATED PROCESS SYSTEMS LTD.
发明人
LEE, SANG JIN;PARK, SANG KWON;LEE, SANG KYOO;SEO, TAE WOOK
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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