Sputtering cathod for coating methods

摘要

A sputtering cathode for coating processes comprises: a supporting structure comprising a hollow body, which is closed gas-tight against an interior space of vacuum chamber, and which connects a hollow space encompassing a magnet system with the atmosphere outside of the vacuum chamber; and cooling agent channel closed on its cross-sectional periphery with at least one flat side in thermally conducting connection with the metallic diaphragm. A sputtering cathode (1) for coating processes in a vacuum chamber (18) comprises an at least single-piece target plate (2) mounted on a metallic diaphragm (3) on whose side facing away from a target plate are disposed a cooling agent channel with an inflow line (9) and an outflow line (10) for a cooling agent and a hollow space (7) for at least one magnet system. The magnet system is disposed in a supporting tub (6) sealed against the diaphragm and not contacted by the cooling agent and the entire configuration being disposed on a supporting structure (12). The supporting structure for the sputtering cathode comprises a hollow body (13), which is closed gas-tight against the interior space of the vacuum chamber and which connects the hollow space encompassing the magnet system with the atmosphere outside of the vacuum chamber. The cooling agent channel is a conduit (4) closed on its cross sectional periphery with at least one flat side (4a) in thermally conducting connection with the diaphragm. The diaphragm and the surfaces of the conduit facing away from the diaphragm are exposed via the supporting structure to the atmospheric pressure outside of the vacuum chamber.