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发明名称
摘要
申请公布号	KR100539850(B1)	申请公布日期	2005.12.28
申请号	KR20040028311	申请日期	2004.04.23
申请人		发明人
分类号	H01L21/20;H01L29/786;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/49	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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