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发明名称
Apparatus and method for measuring the thickness of dielectric films
摘要
申请公布号
EP1318376(A3)
申请公布日期
2005.12.28
申请号
EP20020027524
申请日期
2002.12.06
申请人
ELECTRONIC SYSTEMS S.P.A.
发明人
SAINI, MARCO;TRAFICANTE, FRANCESCO;VIERO, DAVIDE
分类号
G01B7/06;G01D5/24;(IPC1-7):G01B7/06
主分类号
G01B7/06
代理机构
代理人
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