Coating device and method by cathodic sputtering

摘要

Device for coating a substrate (1) using cathodic sputtering comprises a filtering arrangement (10) having a magnetic guiding component (11). The filtering arrangement is structured and arranged so that the sputtered ionized target material (622) is fed to the surface of the substrate through the magnetic component and the sputtered non-ionized target material is filtered through the filtering arrangement before reaching the surface of the substrate. An independent claim is also included for: a method for coating a substrate using the above device.