发明名称 |
ETHYLENIC FLUOROMONOMER CONTAINING HYDROXYL OR FLUOROALKYLCARBONYL GROUP AND FLUOROPOLYMER OBTAINED BY POLYMERIZING THE SAME |
摘要 |
There are provided a fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and represented by the formula (1): <CHEM> and the formula ( 14): <CHEM> respectively, wherein X<1> and X<2> are the same or different and each is H or F; X<3> is H, F, Cl or CF3; Rf<1> and Rf<2> are the same or different and each is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf<3> is a fluorine-containing alkylene group having 1 to 40 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 100 carbon atoms and the sum of carbon atom and oxygen atom of two or more; a is 0 or 1, a fluorine-containing polymer having a structural unit of the above-mentioned monomer and a composition for a photoresist. The monomer has good polymerizability, particularly radical polymerizability, and the polymer obtained by polymerizing the monomer has excellent optical characteristics and is useful as a base polymer for an antireflection film and for a composition for a resist. |
申请公布号 |
EP1375540(A4) |
申请公布日期 |
2005.12.28 |
申请号 |
EP20020700654 |
申请日期 |
2002.02.21 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
ARAKI, TAKAYUKI;KOMATSU, YUZO;KOH, MEITEN |
分类号 |
C07C33/42;C07C43/178;C07C45/45;C07C49/227;C07C49/255;C08F16/04;C08F16/34;C08F216/04;G03F7/004;G03F7/038;G03F7/039;G03F7/09 |
主分类号 |
C07C33/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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