发明名称 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices |
摘要 |
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.
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申请公布号 |
US6978673(B2) |
申请公布日期 |
2005.12.27 |
申请号 |
US20030360962 |
申请日期 |
2003.02.07 |
申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
JOHNSON BURGESS R.;GLENN MAX C.;PLATT WILLIAM P.;ARCH DAVID K.;WEBER MARK W. |
分类号 |
G01C19/56;G01P9/04;(IPC1-7):G01P9/04 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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