发明名称 |
Filtered e-beam inspection and review |
摘要 |
The disclosure relates to filtered e-beam inspection and review. One embodiment pertains to the filtered inspection or review of a specimen with a high aspect ratio feature. Advantageously, the energy and/or angular filtering improves the information retrievable relating to the high aspect ratio feature on the specimen. Another embodiment pertains to a method for energy-filtered electron beam inspection where a band-pass energy filtered image data is generated by determining the difference between a first high-pass energy-filtered image data set and a second high-pass energy-filtered image data set.
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申请公布号 |
US6979824(B1) |
申请公布日期 |
2005.12.27 |
申请号 |
US20040886519 |
申请日期 |
2004.07.07 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
ADLER DAVID L.;GRELLA LUCA |
分类号 |
G01Q30/02;G01Q30/04;H01J37/14;H01J37/244;H01J37/28;(IPC1-7):H01J37/14 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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