发明名称 Method for forming pattern on substrate and method for fabricating liquid crystal display using the same
摘要 The present invention relates to a method of forming a pattern on a substrate and a method of manufacturing a liquid crystal display panel using the same. In order to decrease stitch defect, the shot boundary lines for respective layers of patterns do not overlap each other to be dispersed. Specifically, according to a method of forming patterns of the present invention, after a first material layer is first formed on a substrate, a first pattern is formed by performing a first photo etching including divisional light exposure with at least two areas across at least one shot boundary line on the first material layer. Subsequently, after a second material layer is formed on the first pattern, a second pattern is formed by performing a second photo etching including divisional light exposure with at least two areas across at least one shot boundary line on the second material layer. The shot boundary line in the second photo etching is spaced apart from the shot boundary line in the first photo etching. A liquid crystal display panel is manufactured by using this forming method.
申请公布号 US6979604(B2) 申请公布日期 2005.12.27
申请号 US20030469495 申请日期 2003.11.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 TAK YOUNG-MI;PARK WOON-YONG;LEE JUNG-HO;HONG MUN-PYO;CHUNG KYUHA
分类号 G02F1/1368;G02F1/1333;G02F1/1362;G03F7/00;G03F7/20;(IPC1-7):H01L21/475;G03C5/56 主分类号 G02F1/1368
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