发明名称 Methods of forming semiconductor circuitry
摘要 The invention includes a method of forming semiconductor circuitry. A monocrystalline silicon substrate is provided, and a mask is formed which covers a first portion of the substrate and leaves a second portion uncovered. A trench is formed in the uncovered portion and at least partially filled with a semiconductive material that comprises at least one atomic percent of an element other than silicon. The mask is removed and a first semiconductor circuit component is formed over the first portion of the substrate. Also, a second semiconductor circuit component is formed over the semiconductive material that at least partially fills the trench. The invention also includes semiconductor constructions.
申请公布号 US6979631(B2) 申请公布日期 2005.12.27
申请号 US20040817175 申请日期 2004.03.31
申请人 MICRON TECHNOLOGY, INC. 发明人 GONZALEZ FERNANDO;PING ER-XUAN
分类号 H01L21/8242;H01L21/84;H01L27/12;(IPC1-7):H01L21/20 主分类号 H01L21/8242
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