| 发明名称 |
Packaged microelectromechanical device with lubricant |
| 摘要 |
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
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| 申请公布号 |
US6979893(B2) |
申请公布日期 |
2005.12.27 |
| 申请号 |
US20040811449 |
申请日期 |
2004.03.26 |
| 申请人 |
REFLECTIVITY, INC |
发明人 |
DUNPHY JIM;SIMONIAN DMITRI;PORTER JOHN |
| 分类号 |
B81C1/00;H01L23/20;H01L23/34;(IPC1-7):H01L23/20 |
主分类号 |
B81C1/00 |
| 代理机构 |
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