| 发明名称 |
Carrier head with flexible membrane to provide controllable pressure and loading area |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a controllable load to a substrate in an area with a controllable inner diameter.
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| 申请公布号 |
US6979250(B2) |
申请公布日期 |
2005.12.27 |
| 申请号 |
US20040806649 |
申请日期 |
2004.03.22 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ZUNIGA STEVEN M.;CHEN HUNG CHIH;TSENG MING KUIE |
| 分类号 |
B24B37/04;B24B41/06;B24B49/16;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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