| 摘要 |
FIELD: apparatuses for automatic control of process for assembling micro-electromechanical systems, namely used in micro-manipulators as rotary actuating mechanisms. ^ SUBSTANCE: drive includes base, rotary head, micro-vibrators in the form of three piezoelectric transducers. Base is made as one unit with driven link of micro-manipulator. Base and rotary head are in the form of cylindrical articulation joint. Piezoelectric transducers are arranged in parallel one to other in the same plane; their one ends are secured to base and their other ends are free. On free ends of piezoelectric transducers there are mounted elastically deformed wear resistant members that engage frictionally with rotary head at compression-tension of piezoelectric transducer. ^ EFFECT: enlarged manipulating possibilities, more complex motion paths of working organ of micro-manipulator. ^ 3 dwg |
