NANOPOROUS ULTRAFINE ALPHA-ALUMINA POWDERS AND SOL-GEL PROCESS OF PREPARING THE SAME

摘要

The present invention provides alpha- alumina powders comprising alpha -alumina particles of which at least 80% of the alpha -alumina particles have a particle size of less than 100nm. The invention also provides slurries, particularly aqueous slurries, which comprise alpha -alumina powders of the invention. The invention further provides methods of manufacturing alpha -alumina powders and alpha -alumina slurries of the invention and methods of polishing using same.