METHOD FOR POLISHING SURFACE OF GLASS PLATE, GLASS SUBSTRATE FOR FLAT PANEL DISPLAY, AND FLAT PANEL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a method for polishing the surface of a glass plate by inhibiting expansion of a flaw with a diameter of 40μm or larger existing on the surface of the glass plate into 100μm or larger, a glass substrate for a flat panel display which is polished with the method, and the flat panel display using the glass substrate. SOLUTION: The surface of the glass plate is polished by dipping the glass plate in an aqueous solution containing hydrofluoric acid of 10-30 wt.% and sulfuric acid of 20-50 wt.%. Thereafter, the surface of the glass plate can be polished at the polishing rate of 0.5-20μm/min by dipping the glass plate in an aqueous solution containing hydrofluoric acid. The polished glass plate can be used as the glass substrate for the flat panel display. The glass substrate is used in the production of the flat panel display. COPYRIGHT: (C)2006,JPO&NCIPI