| 摘要 |
PROBLEM TO BE SOLVED: To provide an etching solution which can be used as an etching solution for manufacturing a reflective electrode for a reflection type liquid crystal display device having a silver-based thin film containing gold of a silver-color mirror surface having a high optical reflectivity, can etch gold and another metal to nearly the same extent without any difference in etching rate therebetween, can prevent the progress of side etch, can have an excellent dimesional reproducibility in etching pattern, and can prevent gold residue left after etching. SOLUTION: The etching solution contains alkali cyanide and an oxidizer, and is used in manufacturing a reflective electrode for a reflection type liquid crystal device having a silver-based thin film containing gold formed on a substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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