| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic probe for high temperature that can be manufactured without using any special processes, such as brazing in a vacuum furnace, can improve yields, can stabilize quality, can reduce manufacturing time, can reduce manufacturing costs, does not cause performance to deteriorate much even after long-term repetitive use, and is capable of measurement accurately even if a mount position is at high temperature. SOLUTION: The ultrasonic probe for high temperature comprises a conductive pedestal 12 having a detection inner surface 12a in contact with a non-measurement surface 1 and a detection inner surface 12b in parallel with the detection outer surface; a flat piezoelectric element 16 adhering to the detection inner surface via a first heat-resistant soft metal 14a; a flat pressurization member 18 for pressurizing the piezoelectric element toward the detection inner surface via a second heat-resistant soft metal 14b; a heat-resistant energization member 20 for energizing the pressurization member toward the detection inner surface; and a reaction receiving member 22 that is made of an insulating material, comes into contact with a heat-resistant energization member, and receives the reaction of energization force. The piezoelectric element 16, the measurement inner surface 12b, and the pressurization member 18 are adhered by the deformation of the first heat-resistant soft metal 14a and the second heat-resistant soft metal 14b, and voltage is applied between the pedestal 12 and the pressurization member 18 or voltage is measured. COPYRIGHT: (C)2006,JPO&NCIPI
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