| 摘要 |
<p>A nano imprint system (1), comprising a shell treatment part (2), preliminary heating parts (3), a heating part (4), a press device (5), and a cooling part (6). A work and a stamper positioned oppositely to each other are sealed in a shell in the shell treatment parts (2), the shell is pre-heated in the preliminary heating part (3) and then heated in the heating part (4), and the shell is fed to the press device (5). In the press device (5), the stamper is pressed against the work by pressurizing the shell to transfer microscopic rugged structure on the work. The shell taken out from the press device (5) is cooled in the cooling part (6) anda product is taken out in the shell treatment part (2).</p> |
