STICKING METHOD AND STICKING APPARATUS

摘要

PROBLEM TO BE SOLVED: To stick a cover layer to a substrate so that wrinkles are not generated.

SOLUTION: A PC (Polycarbonate) sheet 502 is provided on a table 506. A center pin 501 with a step penetrating through center holes of the sheet 502 and a disk substrate 503 is provided. The disk substrate 503 is held to be parallel to the sheet 502 by the step above the sheet 502 on the periphery of the center hole. A chamber 504 is closed, the inner part of the chamber is evacuated and a space of reduced pressure is formed. In a vacuum state, a pusher plate 505 via a cylinder descends at high speed and an adhesive applied surface of the disk 503 comes in contact with the PC sheet 502 for a short time. After that, a stuck disk whose adhesive is uncured is made to be in a separated state from the table 506 by spring force of a spring 507. The UV curing adhesive is cured and the cover layer is formed.

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