| 摘要 |
PROBLEM TO BE SOLVED: To provide an irregular sphere detecting apparatus capable of highly precisely detecting irregular spheres among solder balls mixedly containing single spheres and combined spheres. SOLUTION: This irregular sphere detecting apparatus has a holding means equipped with multiple receiving parts storing individual spheres separately; a means detecting sphere parts protruded from the receiving parts; and a moving means moving at least one of a mounting part and the detecting part to inspect the spheres in order by the detecting means, to thereby detect abnormal spheres using detection information of the protruded sphere parts. Ball sticking is suppressed by applying surface treatment to the receiving parts and circumference thereof, to highly accurately detect the abnormal spheres. COPYRIGHT: (C)2006,JPO&NCIPI
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