| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide plasma treatment apparatus in which a pair of opposing electrodes are easily attached to a solid dielectric member bonded to at least one of opposing surfaces of the electrodes and easily removed from the member, and the member does not fall off during plasma treatment, and a gap is formed between the electrodes and the member during plasma treatment, in which discharge does not occur. <P>SOLUTION: Plasma treatment apparatus has a pair of opposing electrodes and a solid dielectric member bonded to one of opposing surfaces of the electrodes, wherein suction means is provided for bonding between at least one of electrodes and the solid dielectric member by vacuum suction. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
