LIGHT INTENSITY DISTRIBUTION EVALUATING METHOD, ADJUSTING METHOD, ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To evaluate the distribution of the intensity of light formed on the illumination pupil surface of an illumination optical device, for example, as effectively equivalent and uniform light intensity distribution while considering not only its outer form but also non-uniform distribution.

SOLUTION: A method of evaluating the light intensity distribution approximately formed in the shape of an annular as uniform light intensity distribution using the shape of an annular effectively equivalent therewith includes a step of determining a primary moment value for the light intensity distribution approximately formed in the shape of the annular (S2); determining a secondary moment value for the light intensity distribution approximately formed in the shape of the annular (S3); determining an intermediate diameter corresponding to an average value of an annular outer diameter and an inner diameter of the uniform light intensity distribution based on the primary moment value (S4); and determining a width corresponding to a difference of the annular outer diameter and the inner diameter of the uniform light intensity distribution based on the secondary moment value (S5).

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