WATERPROOF ALUMINUM NITRIDE POWDER AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method or the like of manufacturing aluminum nitride powder having high thermal conductivity and excellent waterproofness. SOLUTION: The method of manufacturing the aluminum nitride powder having excellent waterproofness is carried out by heat-treating the aluminum nitride powder at 850-1,100°C in an atmosphere containing steam to form an oxide film having high waterproofing property on the surface with small amount of oxidation. As a result, aluminum nitride powder on which waterproofness is imparted is obtained and a resin composition for sealing a semiconductor or a grease composition for releasing heat which has the reliability to moisture resistance and high thermal conductivity are obtained. COPYRIGHT: (C)2006,JPO&NCIPI