| 摘要 |
PROBLEM TO BE SOLVED: To provide a transport device for transporting flat plates capable of making the transport with a larger force than the conventional while the deflection due to the weight is suppressed as much as practicable. SOLUTION: The transport device is equipped with an air float 5 to bear the weight of a flat plate, a first transporting force supply means 7 capable of exerting a force to transport the flat plate with its one surface across the thickness using a roller 15, a second supporting means 9 for object to be transported to support the flat plate with its other surface using a roller 17, and an energizing means 11 to energize the roller 15 of the first transporting force supply means 7 so that the flat plate can be pinched by the first transporting force supply means 7 and the second supporting means 9 for object to be transported. COPYRIGHT: (C)2006,JPO&NCIPI
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