ATMOSPHERIC PRESSURE CVD SYSTEM AND METHOD FOR CLEANING GAS BLOW-OFF PORT OF THE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an atmospheric pressure CVD system which gasifies and removes deposits such as SiO2stuck to the gas blow-off port of a gaseous material by blowing off cleaning gas thereto. SOLUTION: The atmospheric pressure CVD system 1 has a unit 20 for supplying a gaseous material and is an apparatus for supplying the gaseous material and forming a thin film on the surface of an object to be treated by a vapor phase reaction. The apparatus comprises a heater unit 10 for heating an object to be heated, and a cleaning unit 30 for blowing off the cleaning gas 38 which is made into a plasma and removes the deposits such as the SiO2stuck to a gas diffuser 22 of a gaseous material supply unit 20 as the gas blow-off port. The cleaning unit 30 is equipped with electrodes 32 and 33 facing each other apart a spacing and discharges electricity under nearly the atmospheric pressure by applying a voltage between the electrodes from a power source 34 to make the cleaning gas into the plasma through the discharge space 36. COPYRIGHT: (C)2006,JPO&NCIPI