| 摘要 |
PROBLEM TO BE SOLVED: To provide a spindle device discharging foreign matter and the like sucked in a communicating passage to the outside, and preventing the foreign matter from entering a clearance. SOLUTION: The spindle device comprises a rotating shaft formed with the communicating passage opening to a vacuum chuck at one end, a cylindrical housing rotatably supporting a rotating shaft through a bearing, and a suction hole for sucking the communicating passage provided on a cylindrical wall of the housing. The spindle device is provided with an outer ring spacer fitted with an inner peripheral surface of the housing and abutting on an outer ring of a rolling bearing, an outer peripheral annular groove communicating to the communicating passage formed on an outer peripheral surface of a disc-shaped rotating flange formed on an outer periphery of the rotating shaft, a circular groove formed by digging a root portion of one surface of the rotating flange in an axial direction, an inner peripheral annular groove including the rotating flange provided on an inner peripheral surface of the outer ring spacer and communicating to the suction hole, and a fitting wall fitted with the circular groove provided on the rotating shaft side of the inner peripheral annular groove. Seal clearances formed by the outer peripheral surface of the rotating shaft and the inner peripheral surface of the outer ring spacer are provided both outside of the inner peripheral annular groove. COPYRIGHT: (C)2006,JPO&NCIPI
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