| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaporating a chemical by which the thermal decomposition of the chemical can be suppressed and the residual ratio of the chemical after completing the use can sufficiently be reduced to effectively utilize the chemical without waste. SOLUTION: The method for evaporating the chemical is carried out as follows. A chemical holder 20 holding the chemical by impregnating a sheet material 21 having air permeability with the chemical is used and a hot air stream generated by heat generation of a heating element 11 is passed through the chemical holder 20 to thereby heat the chemical holder 20 with the heat of the hot air stream, evaporate the chemical, lift the evaporated chemical together with the hot air stream and diffuse the chemical into the air. Since the hot air stream is passed through the chemical holder 20, the thermal decomposition of the chemical is suppressed without filling the chemical holder with heat and the residual ratio of the chemical after completing the use is sufficiently small. COPYRIGHT: (C)2006,JPO&NCIPI
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