发明名称 Template
摘要 A template is formed from a layered structure comprising a substrate and a single-phase polymer layer positioned on the substrate. The polymer layer comprises a textured surface, the texturing being caused by induction of stress in the polymer layer. The template finds use in the manufacture of a structure on the nanometre scale, which comprises the steps of providing a template and molding a material on to the template, followed by removal of the molded material from the template to provide a structure on the nanometre scale, such as an array, a grid, an optical device or an electronic device. The template may be made by a method comprising the steps of depositing a layer of a single-, phase polymer on to a substrate, baking the resulting structure at a temperature below the glass transition temperature (T<SUB>g</SUB>) of the single-phase polymer, texturing a surface of the polymer layer by inducing stress in the polymer layer and annealing the resulting structure to provide a template.
申请公布号 US2005281982(A1) 申请公布日期 2005.12.22
申请号 US20050534931 申请日期 2005.05.13
申请人 INGENIA TECHNOLOGY LTD 发明人 LI SHUNPU
分类号 B81B1/00;G03F7/00;(IPC1-7):B05D3/02;B05D1/40;B32B3/30 主分类号 B81B1/00
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