HIGH-PERFORMANCE SEPARATION MICROCOLUMN ASSEMBLY AND METHOD OF MAKING SAME

摘要

A high-performance separation microcolumn assembly and method for making such an assembly are provided. The assembly includes high­performance Si-glass µGC separation columns having integrated heaters and temperatures sensors for temperature programming and integrated pressure sensors for flow control. These columns, integrated on a die, are fabricated using a silicon­on-glass dissolved-wafer process. The TCR of the temperature sensors and the sensitivity of the pressure sensors satisfy the requirements needed to achieve reproducible separations in a µGC system. Using these columns, highly-resolved multiple-component separations were obtained with analysis times a factor of two faster than isothermal responses.