| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device excellent in uniform temperature distribution and in stability of cleanliness. SOLUTION: The heating device 1 comprises: a plurality of heating walls 4, 5 vertically arranged to oppose each other with a clearance inside a space 3 surrounded by a heat insulating material 2a constituting a rectangular parallelepiped box shaped heater 2; a plurality of hole sections 6 horizontally provided in the heating walls 4, 5; electric heaters 7 removably inserted into the hole sections 6; a plurality of heat transfer walls 8, 9 arranged with a clearance between the heating walls 4, 5; a plurality of platelike heat radiating members 10 arranged like shelves between the heat transfer walls 8, 9; and housing spaces 12 provided between the heat radiating members 10 adjacent in vertical direction for housing an object to be heated 11. COPYRIGHT: (C)2006,JPO&NCIPI
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