| 摘要 |
PROBLEM TO BE SOLVED: To efficiently acquire image of a specimen due to reflected or diffracted lights radiated in difference directions, to shorten an inspection time in a substrate inspection device, and to provide a substrate inspection method. SOLUTION: The specimen 1 is illuminated linearily by an illumination part 2 and a lens 4 for forming the lights, which are radiated in different angular directions from the specimen 1 into images at different positions of an image surface is provided, while a CCD camera 3 constituted so as to form these images at different positions on a two-dimensional CCD 5 at the same time is provided. Then, the image data of the light radiated within the range of angle widthθcan be acquired, at the same time. These image data are read at each radiation direction to inspect flaws. COPYRIGHT: (C)2006,JPO&NCIPI
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