| 摘要 |
PROBLEM TO BE SOLVED: To provide a mist collector capable of improving the efficiency of separation of a process liquid from a gas/liquid mixed fluid. SOLUTION: The mist collector 10 is equipped with a feed pipe 14 for feeding a gas/liquid mixed fluid discharged from a processing section; a fluid inflow chamber 22 communicating with the feed pipe 14 and having a liquid reservoir 18 on its bottom; a mist collection section 24 arranged above the fluid inflow chamber 22, packed with a mist collection member 28 that collects mist of the process liquid in the gas/liquid mixed fluid flowing from the fluid inflow chamber 22, converts it into liquid drops, and is permeable to the gas, and allowing the liquid drops to fall into the fluid inflow chamber 22 by gravity; a discharge pipe 16 for discharging the gas passed through the inside of the mist collection material 28 of the gas/liquid separation section 24; and a process liquid pipe 20 for discharging the process liquid 30 accumulated in the liquid reservoir 18. COPYRIGHT: (C)2006,JPO&NCIPI
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