发明名称 |
Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung |
摘要 |
<p>This invention is directed to a carbon film-coated article comprising a substrate; a mixed layer formed on at least a part of the substrate, and composed of an element(s) constituting the substrate and tungsten; a tungsten film formed on the mixed layer; and a carbon film formed on the tungsten film. The invention provides a method of producing the carbon film-coated article, the method comprising the steps of: forming a mixed layer on at least a part of the substrate, the mixed layer being composed of an element(s) constituting the substrate and tungsten, forming a tungsten film on the mixed layer, and forming a carbon film on the tungsten film, wherein at least one of the mixing layer, the tungsten film and the carbon film is formed using a cathode material evaporated by arc discharge in a vacuum arc deposition apparatus having a vacuum arc evaporation source including the cathode.</p> |
申请公布号 |
DE60300293(T2) |
申请公布日期 |
2005.12.22 |
申请号 |
DE2003600293T |
申请日期 |
2003.07.09 |
申请人 |
NISSIN ELECTRIC CO., LTD. |
发明人 |
MURAKAMI, YASUO;MIKAMI, TAKASHI;MURAKAMI, HIROSHI |
分类号 |
C23C14/02;C23C14/06;C23C14/24;C23C28/00;(IPC1-7):C23C14/06 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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