| 摘要 |
PROBLEM TO BE SOLVED: To provide a combined sensor capable of measuring pressure and temperature more accurately and its manufacturing method, in realizing the complex sensor by integrating a pressure sensor and a temperature sensor in one tip. SOLUTION: The combined sensor comprises the pressure sensor having many piezoresistances of which resistance values vary according to an external pressure variation and that are arranged in the direction in which piezoelectric effect by the external pressure becomes a first predetermined level or higher, and the temperature sensor having a resistance of which resistance value varies according to a temperature variation and that is arranged in the direction in which piezoelectric effect by the external pressure becomes a second predetermined level or lower. Thus, the pressure sensor and the temperature sensor can be integrated in one tip. Each sensor can sense the pressure and temperature more accurately, and, especially in the temperature sensor, the error in sensing temperature generated by the piezoelectric effect according to the external pressure variation can be eliminated. COPYRIGHT: (C)2006,JPO&NCIPI |
