| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting the frequency of an acoustic surface wave element by which the frequency can be precisely adjusted, and to provide a method for manufacturing the acoustic surface wave element. SOLUTION: The method is for adjusting the frequency of the acoustic surface wave element in which comb-shaped electrodes 32, 38 are formed on the surface of a piezoelectric substrate 39 or on the surface of a piezoelectric thin film provided on the substrate, and an insulating film 41 for covering the comb-shaped electrodes is provided. A region where the film thickness of the insulating film is reduced is irradiated with a short pulse laser capable of suppressing a thermal impact to the surroundings. COPYRIGHT: (C)2006,JPO&NCIPI
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