| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming method of a carbon film capable of easily forming a carbon film tightly. SOLUTION: This film-forming method comprises a step of dispersing a carbon nano-structure in a solvent to obtain slurry, a step of applying the slurry on a surface of a substrate 10 and a step of annealing the substrate applied with the slurry. COPYRIGHT: (C)2006,JPO&NCIPI
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