| 摘要 |
PROBLEM TO BE SOLVED: To provide a partial formation method for a thin film solving a problem that a correction ink overflows from a recessed part, i.e., a correction portion and correction cannot be performed in the correction of the thin film by ink jet and previously performing liquid repellent treatment of the whole surface of a substrate in order to suppress overflowing from the recessed part. SOLUTION: After a wider area than the correction position including a foreign matter 6 on an insulation layer 5 such as TFT liquid crystal panel is previously coated with an ink for pre-treatment by an ink jet head 1 to form a pre-treatment coating part 7, the position to be corrected is removed to form the recessed part 8. Thereafter, recessed part 8 is coated once or several timed with the correction ink by the ink jet head 1 to required film thickness to form a correction coating part 9. Since the pre-treatment ink has high liquid repellent property relative to the correction ink, the liquid repellent property of a peripheral part formed with the thin film can be controlled by the previously coated pre-treatment ink and spreading of the correction ink is controlled to form the thin film at a desired portion. COPYRIGHT: (C)2006,JPO&NCIPI
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