发明名称 Corrosion resistant member and method for manufacturing the same
摘要 A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
申请公布号 US2005282034(A1) 申请公布日期 2005.12.22
申请号 US20050194126 申请日期 2005.07.28
申请人 KYOCERA CORPORATION 发明人 HAYASAKI TETSUJI;NAKAHARA MASAHIRO
分类号 C23C14/08;B32B9/00;C04B41/50;C04B41/52;C04B41/87;C23C4/10;C23C4/12;C23C4/18;C23C16/44;C23C28/04;H01J37/32;(IPC1-7):B32B9/00 主分类号 C23C14/08
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