发明名称 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
摘要 |
Embodiments of a transition metal alloy having an n-type or p-type work function that does not significantly shift at elevated temperature. The disclosed transition metal alloys may be used as, or form a part of, the gate electrode in a transistor. Methods of forming a gate electrode using these transition metal alloys are also disclosed.
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申请公布号 |
US2005280050(A1) |
申请公布日期 |
2005.12.22 |
申请号 |
US20050202541 |
申请日期 |
2005.08.11 |
申请人 |
DOCZY MARK;BAXTER NATHAN;CHAU ROBERT S;HARKONEN KARI;LANG TEEMU |
发明人 |
DOCZY MARK;BAXTER NATHAN;CHAU ROBERT S.;HARKONEN KARI;LANG TEEMU |
分类号 |
C22C32/00;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L29/49;(IPC1-7):H01L27/148;H01L21/320;H01L29/768;H01L21/476 |
主分类号 |
C22C32/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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