| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a window and a target for a short wave-length light source by forming a barrier at a local area in a vacuum container by a supersonic gas jet by using a slit-shaped supersonic nozzle and a diffuser in a state of keeping high-vacuum, and by cooling a high-temperature plasma, and by making light transmit while eliminating generation of impurities. <P>SOLUTION: Alligned are: a high-temperature plasma generating device; a supersonic nozzle part 41 accelerating an operation gas in supersonic speed, arranged so as to cross the direction in which the high-temperature plasma is generated by the high-temperature plasma generating device; and a supersonic diffuser part 42 making the operation gas decelerate and recover a pressure. A barrier gas layer acting as a barrier of the high-temperature plasma is formed between the supersonic nozzle part and the supersonic diffuser part. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
