| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an imaging element having good photoelectric conversion characteristics. SOLUTION: In the method of manufacturing the imaging element having at least one photoelectric converter on a substrate, the photoelectric converter has at least one transparent electrode, and the transparent electrode is manufactured with a film apparatus made from an opposed target sputter. COPYRIGHT: (C)2006,JPO&NCIPI
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