| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an imaging element having high light utilization efficiency and good photoelectric conversion characteristics. SOLUTION: In the method of manufacturing the imaging element having at least one photoelectric converter on a substrate, the photoelectric converter has at least one type of inorganic material. And, the inorganic material is formed by a facing target sputtering film forming apparatus. COPYRIGHT: (C)2006,JPO&NCIPI
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