发明名称 |
SELF ALIGNED HALL WITH FIELD PLATE |
摘要 |
A self aligned Hall sensor system and method are disclosed. A substrate can be provided. A Hall element and a plurality of contacts can then be formed upon the substrate wherein contacts are located in reference to one another. A field plate formed from polysilicon can then be formed upon the Hall element, wherein the field plate functions as a self-aligning mask for the plurality of contacts such that when the field plate is biased, a number of mobile carriers present at a surface of the field plate are minimized throughout the surface and up to and including the plurality of contacts, thereby minimizing asymmetry and offsets associated with the Hall element.
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申请公布号 |
US2005280107(A1) |
申请公布日期 |
2005.12.22 |
申请号 |
US20040869336 |
申请日期 |
2004.06.16 |
申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
COHEN ISAAC D. |
分类号 |
G01R33/07;H01L29/82;(IPC1-7):H01L29/82 |
主分类号 |
G01R33/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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