发明名称 |
ADJUSTING A SAMPLING RATE BASED ON STATE ESTIMATION RESULTS |
摘要 |
<p>A method and an apparatus (120) are provided for adjusting a sampling rate based on a state estimation result. The method comprises receiving metrology data associated with processing of workpieces, estimating a next process state based on at least a portion of the metrology data and determining an error value associated with the estimated next process state. The method further comprises processing a plurality of workpieces based on the estimated next process state and adjusting a sampling protocol of the processed workpieces that are to be measured based on the determined error value.</p> |
申请公布号 |
KR20050120697(A) |
申请公布日期 |
2005.12.22 |
申请号 |
KR20057018826 |
申请日期 |
2003.12.22 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
WANG, JIN;CUSSON BRIAN K. |
分类号 |
G05B19/418;(IPC1-7):G05B19/418 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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